Single-cell picking by integrated micropipette having sensor for passage detection of cell

In order to achieve detection of flowing cells in the glass capillary, we proposed the integrated micropipette. In this research, we focused on the fabrication of microcapillary. The fabrication method is based on MEMS packaging technique. Two glass layer; a micro channel and a sensor layer are bonded, and we can get microcapillary with capacitance sensor for detection of cell flowing. By using fabricated microcapillary, we successfully achieved aspirating and detecting of cells flowing in a microchannel.