SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases

Abstract Surface acoustic wave (SAW)-based sensors, with InO x and SiN x layers on 36° YX LiTaO 3 substrates were investigated for the detection of hydrogen (H 2 ) and ozone (O 3 ) gases at different operating temperatures. SiN x films with different thicknesses were deposited using the plasma enhanced chemical vapour deposition (PECVD) method. The InO x sensing layer was deposited using an rf magnetron sputterer. The sensors’ performance was analyzed in terms of their frequency shifts as a function of different gas concentrations. The chemical–physical characterization of the deposited films was carried out by X-ray photoelectron spectroscopy (XPS). High sensitivities and excellent repeatabilities were observed towards both gases.

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