论文信息 - High Throughput Ion-Implantation for Silicon Solar Cells

High Throughput Ion-Implantation for Silicon Solar Cells

Abstract Ion implantation is a technique that has been demonstrated to improve solar cell efficiency and eliminate process steps in standard and advanced cell designs. Intevac has developed a high productivity, continuous flux ion implantation tool for solar cells. We demonstrate improved n-type emitters over POCl3 diffused emitters, and selective patterning capabilities. Additionally, it is shown that non-mass analyzed implantation provides similar performance as mass-analyzed implantation, yet at a much lower capital cost.

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