论文信息 - A fast versatile optical profilometer

A fast versatile optical profilometer

Abstract We describe a new optical profilometer for the measurement of surface roughness of workpieces form the submicrometer range up to several tens of micrometers. The device has speed and sensitivity characteristics better than mechanical profilometers. It overcomes the randomness requirements which limit the use of optical devices working on angular diagrams or speckle correlation measurements.

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