Theoretical distribution of the structural uniformity of the vapor-deposited thin films
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According to the tangent rule, which relates the deposition angle to the growth direction of the columns, which comprise many vapor-deposited thin films, and according to the relative geometric and trigonometric relations between the evaporation source and the substrate, the theoretical distribution formulas describing the uniformity of the colunmar structure are given for four kinds of general fixtures. These distributions have been computed for various conditions. We also analyze and discuss a structural thin-film model, and have concluded that the structure obtained with the rotary spherical fixture is the best of several fixture alternatives.
[1] J. M. Pearson,et al. Electron microscopy of multilayer thin films , 1970 .
[2] T. Radha,et al. On Uniformity of Film Thickness on Rotating Substrates , 1972 .
[3] H. Leamy,et al. Columnar microstructure in vapor-deposited thin films , 1977 .