Highly Scaled Vertical Cylindrical SONOS Cell With Bilayer Polysilicon Channel for 3-D nand Flash Memory
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A. De Keersgieter | B. Douhard | O. Richard | G. Kar | V. Paraschiv | I. Debusschere | J. van Houdt | C. Vrancken | P. Blomme | A. Arreghini | G. Van den bosch | L. Breuil | A. Cacciato | S. Van Aerde