论文信息 - High quality zinc oxide films by pulsed laser ablation

High quality zinc oxide films by pulsed laser ablation

Abstract We have investigated the structural, electrical and optical properties of thin films of zinc oxide deposited by laser ablation. We find that even at room temperature the films are c-axis oriented on both crystalline and amorphous substrates. The electrical dc resistivity is independent of substrate temperature and is about 2–3 mΩ cm−1. The films have low absorption coefficient in the visible part of the spectrum and represent some of the best ZnO films deposited at low temperature.

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