Optical micro-multi-racetrack resonator filter based on SOI waveguides

Abstract In this paper, we present a new design of optical Finite Impulse Response (FIR) filter based on combination of multi-racetrack resonators realized with Silicon waveguides. Numerical investigations were carried out on the spectral response of the proposed filters design, in order to obtain FIR band-pass filter around the photonic carrier wavelength of 1.55 μm. The proposed FIR filter was fabricated using electron beam lithography (EBL). The device was preliminary experimentally examined by a combination of scanning electron microscopy (SEM) and atomic force microscopy (AFM).

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