论文信息 - SiGeO layer formation mechanism at the SiGe/oxide interfaces during Ge condensation - 字舞流文

SiGeO layer formation mechanism at the SiGe/oxide interfaces during Ge condensation

S. Balakumar | G. Lo | D. Kwong | N. Balasubramanian | A. Agarwal | S. Tripathy | K. Hoe | Rakesh Kumar | S. Peng