论文信息 - Effect of 4H-SiC Target Temperature under Ion Irradiation on the Distribution Profile of Al+ Ions - 字舞流文

Effect of 4H-SiC Target Temperature under Ion Irradiation on the Distribution Profile of Al+ Ions

V. Chernysh | V. Egorkin | Yury S. Fedotov | A. Evseev | A. Shemukhin | A. V. Kozhemiako | A. Danilov | B. Merzuk