论文信息 - A fiber-optic pressure microsensor for biomedical applications

A fiber-optic pressure microsensor for biomedical applications

A fiber-optic pressure microsensor with a sensing element only 270/spl times/270/spl times/150 /spl mu/m in size has been developed and applied to actual balloon catheters. The sensing principle is based on the detection of optical reflection intensity changes from a diaphragm located in front of an optical fiber. The sensors have been fabricated using silicon micromaching such as anisotropic etching and direct wafer bonding. For the transmitting source and signal light, a multimode optical fiber 50/125 /spl mu/m (core/clad) in diameter is used. This paper describes the miniaturization of the sensing element through an improved design and the use of thinner silicon wafers, and application of the pressure microsensor to actual balloon catheters 1.5 mm in outer diameter.

O. Tohyama | M. Kohashi | M. Fukui | H. Itoh | M. Fukui

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