Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

[1]  A. Mujumdar,et al.  NUMERICAL FLOW AND HEAT TRANSFER UNDER IMPINGING JETS: A REVIEW , 1989 .

[2]  H. Baltes,et al.  CMOS MEMS , 1997, Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97.

[3]  Peter Vettiger,et al.  A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors , 1998 .

[4]  Isao Shimoyama,et al.  An air flow sensor modeled on wind receptor hairs of insects , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[5]  V. M. Lubecke,et al.  Self-assembling MEMS variable and fixed RF inductors , 2001 .

[6]  Paul R. Young,et al.  Fabrication, RF characteristics and mechanical stability of self-assembled 3D microwave inductors , 2002 .

[7]  Kofi A. A. Makinwa,et al.  A smart wind sensor using thermal sigma-delta modulation techniques , 2002 .

[8]  Tor A. Fjeldly,et al.  CMOS RF Modeling, Characterization and Applications , 2002 .

[9]  Sekwang Park,et al.  A flow direction sensor fabricated using MEMS technology and its simple interface circuit , 2003 .

[10]  Gerald Urban,et al.  Development of miniaturized semiconductor flow sensors , 2003 .

[11]  Jose E. Schutt-Aine,et al.  Development of three-dimensional inductors using plastic deformation magnetic assembly (PDMA) , 2003 .

[12]  M. Wu,et al.  Angular vertical comb-driven tunable capacitor with high-tuning capabilities , 2004, Journal of Microelectromechanical Systems.

[13]  Péter Fürjes,et al.  Thermal characterisation of a direction dependent flow sensor , 2004 .

[14]  W. Noell,et al.  Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[15]  G. Fedder,et al.  CMOS-MEMS: Advanced Micro and Nanosystems (Advanced Micro and Nanosystems) , 2005 .

[16]  S. Jorez,et al.  CMOS compatible 3D flow and thermal sensors in SOI technology , 2005, IEEE Sensors, 2005..

[17]  G. I. Barenblatt,et al.  The turbulent wall jet: a triple-layered structure and incomplete similarity. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[18]  M. Dijkstra,et al.  Arrays of cricket-inspired sensory hairs with capacitive motion detection , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[19]  G. Stemme,et al.  Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements , 2005, Journal of Microelectromechanical Systems.

[20]  Jan G. Korvink,et al.  MEMS: A Practical Guide to Design, Analysis, and Applications , 2005 .

[21]  D. Flandre,et al.  Micromachined thin-film sensors for SOI-CMOS co-integration , 2006 .

[22]  T. Pardoen,et al.  Three-Dimensional Self-Assembled Sensors in Thin-Film SOI Technology , 2006, Journal of Microelectromechanical Systems.

[23]  S. Brebels,et al.  Novel Effa-Based Thin-Film RF-MEMS Technology , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[24]  Imin Kao,et al.  Smart MEMS Flow Sensor: Theoretical Analysis and Experimental Characterization , 2007, IEEE Sensors Journal.

[25]  Yasuroh Iriye,et al.  Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition , 2007 .

[26]  C Johansson.  Magnetic properties of magnetic nanoparticles in New materials for micro-scale sensors actuators : An engineering review , 2007 .

[27]  Denis Flandre,et al.  Bulk and surface micromachined MEMS in thin film SOI technology , 2007 .

[28]  M. S. Lu,et al.  A 5.8-GHz VCO with CMOS-compatible MEMS inductors , 2007 .

[29]  Q. Wahab,et al.  New materials for micro-scale sensors and actuators An engineering review , 2007 .

[30]  J. Engel,et al.  Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity , 2007, Journal of Microelectromechanical Systems.

[31]  Wolfgang Nitsche,et al.  AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection , 2008 .

[32]  Wolfgang Schröder,et al.  Dynamic wall-shear stress measurements in turbulent pipe flow using the micro-pillar sensor MPS3 , 2008 .

[33]  Chien-Hsiung Tsai,et al.  A microcantilever-based gas flow sensor for flow rate and direction detection , 2008, 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS.

[34]  Arantxa Uranga,et al.  VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator , 2009 .

[35]  Massimo Piotto,et al.  Postprocessing, readout and packaging methods for integrated gas flow sensors , 2009, Microelectron. J..

[36]  Anja Boisen,et al.  Cantilever Sensors: Nanomechanical Tools for Diagnostics , 2009 .

[37]  Denis Flandre,et al.  High temperature SOI CMOS low power circuits for MEMS co-integrated interfaces , 2009 .

[38]  Rebecca Cheung,et al.  Plastic deformation magnetic assembly of out-of-plane structures using vapour phase hydrofluoric (HF) acid release , 2009 .

[39]  B T Dickinson,et al.  Hair receptor sensitivity to changes in laminar boundary layer shape , 2010, Bioinspiration & biomimetics.

[40]  Veikko Lindroos,et al.  Handbook of Silicon Based MEMS Materials and Technologies , 2020 .

[41]  Denis Flandre,et al.  Ultra Low Power 3-D Flow Meter in Monolithic SOI Technology , 2011 .

[42]  Ion Stiharu,et al.  Sensitivity Analysis of the Non-Linear Deflection of Non-Straight AFM Micro-Cantilever , 2012 .

[43]  M. Packirisamy,et al.  PDMS Microcantilever-Based Flow Sensor Integration for Lab-on-a-Chip , 2013, IEEE Sensors Journal.