A polymeric micro-cantilever acoustic sensor array has been developed that mimics the biological front-end processing in the cochlea, and is intended for use in applications of auditory prostheses. Made of polymer material, the micro-cantilevers have similar mechanical performance as the basilar membrane. The polymeric cantilevers, which are transparent, are used as optical waveguides to guide an acoustically-modulated light signal to produce a signal suitable for human hearing. These polymeric cantilevers have the Q/sub 10/ values of 9.38, 10.11, 11.56, and 14.01 for resonant frequencies at 286, 720, 2,868, and 6,948 Hz, respectively. These values are similar to those obtained by direct measurement of the basilar membrane. Furthermore, they have a linear dynamic range of more than 80 dB SPL with less than 15% harmonic distortion. This acoustic sensor array has low power consumption, short processing time, high sensitivity, high frequency resolution, small size, is free of electromagnetic interference, and is suitable for a totally implantable device in the human ear.
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