Deposition of micrometer-sized tungsten patterns by laser transfer technique

A simple single‐step technique for surface patterning is presented. It is shown that well‐adhering micrometer‐sized patterns of 100% coverage preserving the shape and dimensions of the ablated area can be deposited by ablating and transferring tungsten thin films in the form of single solid pieces using single pulses of peak power up to 100 mW and 100 μs–1 ms duration from a diode‐pumped YAG laser.

[1]  Tamás Szörényi,et al.  Ar+ laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning , 1993 .

[2]  Tamás Szörényi,et al.  Pulsed laser ablative deposition of thin metal films , 1989 .

[3]  Zsolt Toth,et al.  Pulsed Laser Synthesis And Printing Of Compound Semiconductors , 1989, Other Conferences.

[4]  F. J. Adrian,et al.  Metal deposition from a supported metal film using an excimer laser , 1986 .

[5]  Tamás Szörényi,et al.  Laser induced forward transfer: The effect of support-film interface and film-to-substrate distance on transfer , 1992 .

[6]  Animesh K. Jain,et al.  Pulsed laser heating calculations incorporating vapourization , 1981 .

[7]  Zsolt Toth,et al.  Pulsed laser processing of Ge/Se thin film structures , 1991 .

[8]  A. N. Jette,et al.  A study of the mechanism of metal deposition by the laser-induced forward transfer process , 1987 .

[9]  Eric Fogarassy,et al.  Laser-induced forward transfer: A new approach for the deposition of high T_c superconducting thin films , 1989 .

[10]  Vadim P. Veiko,et al.  Local laser-induced deposition of thin films , 1992, Other Conferences.

[11]  C. Afonso,et al.  Time resolved reflectivity and transmission measurements during laser induced blow-off of thin metal films , 1993 .

[12]  A. N. Jette,et al.  Metal deposition at 532 nm using a laser transfer technique , 1988 .

[13]  G. Was,et al.  Laser-driven micro-explosive bonding of aluminium films to copper and silicon , 1988 .

[14]  Tamas Szoerenyi,et al.  Surface patterning by pulsed-laser-induced transfer of metals and compounds , 1990, Other Conferences.