论文信息 - Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates

Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates

Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature (<250/spl deg/C) process.

[1] I. D. French,et al. The fabrication and characterization of EEPROM arrays on glass using a low-temperature poly-Si TFT process , 1996 .

[2] J. R. Ayres,et al. Fabrication and Characterisation of Poly-Si TFTs on Glass , 1995 .

[3] S. D. Brotherton,et al. Beam Shape Effects with Excimer Laser Crystallisation of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Amorphous Silicon , 1994 .

[4] Setsuo Kaneko,et al. High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film , 1989 .

[5] Y. Nagae,et al. Peripheral circuit integrated poly-Si TFT LCD with gray scale representation , 1988, Conference Record of the 1988 International Display Research Conference.

[6] Masaki Hara,et al. XeCl Excimer Laser Annealing Used to Fabricate Poly-Si TFT's , 1989 .