Fluidic self-assembly of micromirrors onto surface micromachined actuators
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We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the actuator platforms is achieved by pattern matching hydrophobic binding sites on the underside of the mirror and on the platform.
[1] George M. Whitesides,et al. Three-dimensional self-assembly of millimetre-scale components , 1997, Nature.
[2] J. M. Noworolski,et al. Microassembly technologies for MEMS , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.