2.06 – Vibrating Gyroscopes

Silicon micromachined gyroscopes have gained immense popularity in the automotive and consumer electronics industry owing to their miniature size, low power consumption, and compatibility with regular Complementary Metal Oxide Semiconductor (CMOS) Integrated Circuit fabrication technology. Vibrating micromachined gyroscopes rely on the Coriolis-induced transfer of energy between two vibration modes of a microstructure. A comprehensive analysis of performance parameters, system blocks, and operation is presented in this chapter, which is illustrated succinctly with a mode-matched silicon tuning fork gyroscope as a case study.

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