Surface micromachined on-chip transformer fabricated on glass substrate

On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.