论文信息 - Metastable defect states and equilibration temperatures in a-SiNx:H, a-SiOx:H and a-SiCx:H - 字舞流文

Metastable defect states and equilibration temperatures in a-SiNx:H, a-SiOx:H and a-SiCx:H

H. Fritzsche | X. Deng | A. Hamed | S. Köhler | R. Gupta