Maintenance control method and system used for semiconductor processing equipment

The invention discloses a maintenance control used for semiconductor processing equipment. The method comprises the following steps of: judging a function module sending a maintaining request; processing the maintaining request by a parallel processing mode, if the function module is a parallel module and not in a standby state; processing the maintaining request by a serial processing mode, if the function module is a serial module and not in the standby state; and directly maintaining the function module needing maintaining, if the function module is in the standby state. In addition, the invention also provides a maintenance control system used for the semiconductor processing equipment and the semiconductor processing equipment. The maintenance control method and the maintenance control system can effectively maintain the semiconductor processing equipment in time, and also can keep higher production efficiency and reduce/avoid waste. The semiconductor processing equipment not only can be effectively maintained in time, but also can keep higher production efficiency and reduce/avoid the waste when maintained.