Passivation of GaSb by sulfur treatment

Some features of the band structure of GaSb have led to a renewed interest in this material. It is well known that Ga(Al)Sb alloys are good candidates to realize avalanche photodetectors, due to their high hole kp/electron kn ionization coefficient ratio. In addition, recent studies have shown GaSb to be attractive for realizing tunneling barriers exhibiting a high value of the peak-to-valley current ratio or IR photodectectors. In order to optimize such devices, the passivation of GaSb is of great interest. Unfortunately, very few investigations have been reported in the literature on GaSb passivation. This paper reports experimental results concerning GaSb surface passivation using a chemical sulfuration method. Physicochemical analysis is attempted through ellipsometric, photoluminescence, and Auger electron spectroscopy measurements. Polluting oxygen and carbon agents are found to be removed from the surface using this process, leading to Schottky diodes of better quality. In addition, the sulfur treatment is shown to stabilize the cleaned surface.

[1]  W. Spicer,et al.  Sulfur passivation of GaAs surfaces: A model for reduced surface recombination without band flattening , 1989 .

[2]  W. I. Wang,et al.  Resonant interband coupling in single‐barrier heterostructures of InAs/GaSb/InAs and GaSb/InAs/GaSb , 1990 .

[3]  T. C. Mcgill,et al.  Demonstration of large peak‐to‐valley current ratios in InAs/AlGaSb/InAs single‐barrier heterostructures , 1989 .

[4]  J. Bonnet,et al.  Role of defects in the passivation of III–V semiconductor surfaces modified by alkali metals: O2/Rb/p‐ and n‐type GaSb(110) , 1992 .

[5]  L. A. Koszi,et al.  Optical properties of anodically grown native oxides on some Ga‐V compounds from 1.5 to 6.0 eV , 1977 .

[6]  A. Cowley Depletion Capacitance and Diffusion Potential of Gallium Phosphide Schottky‐Barrier Diodes , 1966 .

[7]  A. Cho,et al.  A new GaSb/AlSb/GaSb/AlSb/InAs double‐barrier interband tunneling diode and its tunneling mechanism , 1990 .

[8]  I. Lindau,et al.  Vacuum ultraviolet photoelectron spectroscopy of (NH4)2S‐treated GaAs (100) surfaces , 1989 .

[9]  Ionization coefficients in Ga0.96Al0.04Sb , 1990 .

[10]  T. Schlesinger,et al.  Electrical properties of GaSb Schottky diodes and p-n junctions , 1992 .

[11]  R. Racicot,et al.  Surface passivation of GaAs , 1989 .

[12]  S.M.Sze,et al.  Surface States and Barrier Height of Metal‐Semiconductor Systems , 1965 .

[13]  W. I. Wang,et al.  GaSb‐oxide removal and surface passivation using an electron cyclotron resonance hydrogen source , 1992 .

[14]  Eli Yablonovitch,et al.  Nearly ideal electronic properties of sulfide coated GaAs surfaces , 1987 .

[15]  O. Hildebrand,et al.  Ga 1-x Al x Sb avalanche photodiodes: Resonant impact ionization with very high ratio of ionization coefficients , 1981 .

[16]  S. Bhoraskar,et al.  Interfacial properties of n-GaAs and polymer deposited by plasma chemical vapor deposition , 1989 .