论文信息 - A physically based model for dielectric charging in an integrated optical mems wavelength selective switch

A physically based model for dielectric charging in an integrated optical mems wavelength selective switch

A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch

G. Barbastathis | G. Nielson

[1] G. Barbastathis,et al. Integrated wavelength-selective optical MEMS switching using ring resonator filters , 2005, IEEE Photonics Technology Letters.

[2] A. Gasparyan,et al. Effects of electrical leakage currents on MEMS reliability and performance , 2004, IEEE Transactions on Device and Materials Reliability.

[3] Robert Puers,et al. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches , 2004 .

[4] B. Pillans,et al. Lifetime characterization of capacitive RF MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[5] Michael Hietschold,et al. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[6] R. Gomer,et al. Field Ionization in Liquids , 1969 .

[7] D. Dikin,et al. Resonance vibration of amorphous SiO2 nanowires driven by mechanical or electrical field excitation , 2003 .