Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm wavelength laser
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W. Wang | S. Chen | Wenpeng Wang | X. Yang | Y. Ma | G. B. Zhang | Y. Cui | M. Zi | Xiao-Hu Yang | Y. Leng | Shijia Chen | Yun Yuan | Yan-Yun Ma | Y. Yuan | Yuxin Leng | Ye Cui | Guobo Zhang