Note: Alignment/focus dependent core-line sensitivity for quantitative chemical analysis in hard x-ray photoelectron spectroscopy using a hemispherical electron analyzer.

X-ray photoelectron spectroscopy is an established technique for quantitative chemical analysis requiring accurate peak intensity analysis. We present evidence of focus∕alignment dependence of relative peak intensities for peaks over a broad kinetic energy range with a hemispherical electron analyzer operated in a position imaging mode. A decrease of over 50% in the Ag 2p₃/₂ to Ag 3d ratio is observed in a Ag specimen. No focus∕alignment dependence is observed when using an angular imaging mode, necessitating the use of angular mode for quantitative chemical analysis.