DESIGN OF CMOS READOUT FRONTEND CIRCUIT FOR MEMS CAPACITIVE MICROPHONES

This paper deals with a frontend part of the readout circuit developed as an integrated circuit that after bonding together with a MEMS capacitive microphone (MCM) chip will be used in a noise dosimeter applicable in very noisy and harsh environment, e.g. mine. Therefore, the main attention has been paid to the high dynamic range, low offset and low noise of the developed readout interface as well as its low-power consumption feature. For conversion of the MCM’s capacitance variation into voltage, an approach based on the buffered input conversion stage biased by a voltage divider formed by diode-connected MOS transistors was used. The advantage of this approach is that the voltage divider formed by MOS transistors can be connected to the high-impedance node (output of the MCM). The whole frontend part of readout interface was designed in a standard 0.35 um CMOS technology. Finally, the achieved results are discussed and compared to other works.

[1]  A. Baschirotto,et al.  A low-power interface for the readout and motion-control of a MEMS capacitive sensor , 2008, 2008 10th IEEE International Workshop on Advanced Motion Control.

[2]  G. Fedder,et al.  A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-g = Hz Monolithic CMOS MEMS Accelerometer , 2004 .

[3]  Meng Zhao,et al.  An offset-compensated switched-capacitor interface circuit for closed-loop MEMS capacitive accelerometer , 2012, 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology.

[4]  A. Baschirotto,et al.  A Switched Capacitor Interface for a Capacitive Microphone , 2006, 2006 Ph.D. Research in Microelectronics and Electronics.

[5]  Shahriar Mirabbasi,et al.  A 5-V 555-μW 0.8-μm CMOS MEMS capacitive sensor interface using correlated level shifting , 2013, 2013 IEEE International Symposium on Circuits and Systems (ISCAS2013).

[6]  Shahriar Mirabbasi,et al.  A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors , 2011, 2011 IEEE 9th International New Circuits and systems conference.

[7]  David Bishop,et al.  Capacitive MEMS microphones , 2005, Bell Labs Technical Journal.

[8]  Behraad Bahreyni,et al.  A readout circuit with wide dynamic range for differential capacitive sensing applications , 2013, 2013 26th IEEE Canadian Conference on Electrical and Computer Engineering (CCECE).

[9]  Larry K. Baxter,et al.  Capacitive Sensors: Design and Applications , 1996 .

[10]  G.K. Fedder,et al.  A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer , 2004, IEEE Journal of Solid-State Circuits.

[11]  Andrea Baschirotto,et al.  Nyquist AD converters, sensor interfaces, and robustness : advances in analog circuit design, 2012 , 2013 .

[12]  E. Vittoz,et al.  A CMOS Chopper Amplifier , 1986, ESSCIRC '86: Twelfth European Solid-State Circuits Conference.

[13]  Marvin H. White,et al.  Characterization of surface channel CCD image arrays at low light levels , 1974 .

[14]  A. Baschirotto,et al.  A 828μW 1.8V 80dB dynamic-range readout interface for a MEMS capacitive microphone , 2008, ESSCIRC 2008 - 34th European Solid-State Circuits Conference.

[15]  Jiwei Jiao,et al.  A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope , 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[16]  Wouter Olthuis,et al.  High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter , 1998 .

[17]  Jung-Tang Huang,et al.  A differential capacitive sensing circuit for micro-machined omnidirectional microphone , 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[18]  Jeroen van den Boom.  A 50μW biasing feedback loop with 6ms settling time for a MEMS microphone with digital output , 2012, ISSCC.

[19]  Chang Han Je,et al.  Design, Fabrication, and Characterization of a Readout Integrated Circuit (ROIC) for Capacitive MEMS Sensors , 2007, 2007 IEEE Sensors.

[20]  Fürst,et al.  A LOW-NOISE/LOW-POWER PREAMPLIFIER FOR CAPACITIVE MICROPHONES , 2004 .

[21]  Arindam Basu,et al.  A Charge-Based Low-Power High-SNR Capacitive Sensing Interface Circuit , 2008, IEEE Transactions on Circuits and Systems I: Regular Papers.

[22]  Bertan Bakkaloglu,et al.  A MEMS-Based Power-Scalable Hearing Aid Analog Front End , 2011, IEEE Transactions on Biomedical Circuits and Systems.

[23]  Deog-Kyoon Jeong,et al.  A Digital Readout IC with Digital Offset Canceller for Capacitive Sensors , 2012 .

[24]  Marc Pastre,et al.  Methodology for the digital calibration of analog circuits and systems using sub-binary radix DACs , 2009, 2009 MIXDES-16th International Conference Mixed Design of Integrated Circuits & Systems.

[25]  Boyd Fowler,et al.  Reset noise reduction in capacitive sensors , 2006, IEEE Transactions on Circuits and Systems I: Regular Papers.

[26]  A. Baschirotto,et al.  A MEMS microphone interface with force-balancing and charge-control , 2008, 2008 Ph.D. Research in Microelectronics and Electronics.

[27]  Cheng-Ta Chiang,et al.  A CMOS readout circuit with frequency optimization for microphone sensor arrays , 2010, 2010 International Symposium on Computer, Communication, Control and Automation (3CA).

[28]  Jong-Kee Kwon,et al.  A Low-Power, Wide-Dynamic-Range Semi-Digital Universal Sensor Readout Circuit Using Pulsewidth Modulation , 2011, IEEE Sensors Journal.

[29]  Andrea Baschirotto,et al.  A multifunction low-power preamplifier for MEMS capacitive microphones , 2009, 2009 Proceedings of ESSCIRC.

[30]  Gabor C. Temes,et al.  Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization , 1996, Proc. IEEE.