论文信息 - Low temperature a-Si:H TFT on plastic films: materials and fabrication aspects

Low temperature a-Si:H TFT on plastic films: materials and fabrication aspects

In this work, we developed fabrication technology for a-Si:H thin film transistors (TFTs) at 120/spl deg/C for AM OLED displays on flexible plastic substrates. Our TFTs demonstrate performance very close to those fabricated at 260/spl deg/C. This presentation focuses on materials optimization and fabrication process issues.

Arokia Nathan | D Stryahilev | Andrei Sazonov

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[3] Arokia Nathan,et al. 120 °C fabrication technology for a-Si:H thin film transistors on flexible polyimide substrates , 2000 .