论文信息 - Structural and some other properties of silicon deposited in an SiCl4H2 r.f. discharge - 字舞流文

Structural and some other properties of silicon deposited in an SiCl4H2 r.f. discharge

G. Bruno | Z. Iqbal | P. Capezzuto | F. Cramarossa | G. Bruno | S. Vepřek | H. Oswald | H. Stüssi | J. Brunner | M. Schärli | M. Braun