论文信息 - Evaluation of Crystal Quality and Dopant Activation of Smart CutTM - Transferred 4H-SiC Thin Film - 字舞流文

Evaluation of Crystal Quality and Dopant Activation of Smart CutTM - Transferred 4H-SiC Thin Film

W. Schwarzenbach | J. Widiez | D. Mariolle | Y. Bogumilowicz | G. Lapertot | V. Prudkovskiy | P. Gergaud | Vincent Amalbert | K. Mony | S. Rouchier | G. Gélineau | N. Troutot | G. Berre | R. Boulet | Emmanuel Rolland | Krenema Vladimirova | Alexandre Moulin | Sophie Barbet