Si Photonics for Practical LiDAR Solutions

In the article the authors discuss light detection and ranging (LiDAR) for automotive applications and the potential roles Si photonics can play in practice. The authors review published research work on Si photonics optical phased array (OPA) and other relevant devices in the past decade with in-depth technical analysis with respect to practical system design considerations. The commercialization status of certain LiDAR technologies is briefly introduced.

[1]  B. Mikkelsen,et al.  Single-chip silicon photonics 100-Gb/s coherent transceiver , 2014, OFC 2014.

[2]  Steven A. Miller,et al.  512-Element Actively Steered Silicon Phased Array for Low-Power LIDAR , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[3]  M. Nedeljkovic,et al.  Free-Carrier Electrorefraction and Electroabsorption Modulation Predictions for Silicon Over the 1–14- $\mu\hbox{m}$ Infrared Wavelength Range , 2011, IEEE Photonics Journal.

[4]  L. Coldren,et al.  Hybrid III/V silicon photonic source with integrated 1D free-space beam steering. , 2012, Optics letters.

[5]  Hossein Hashemi,et al.  Monolithic optical phased-array transceiver in a standard SOI CMOS process. , 2015, Optics express.

[6]  Sebastian Thrun,et al.  Model based vehicle detection and tracking for autonomous urban driving , 2009, Auton. Robots.

[7]  T. Mogami,et al.  A 300mm Si photonics platform for optical interconnection , 2015, 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).

[8]  Y. Yoshikuni,et al.  Monolithic integration of InGaAs/InP DFB lasers and InGaAs/InAlAs MQW optical modulators , 1986 .

[9]  Frederic Boeuf,et al.  Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform , 2016, Journal of Lightwave Technology.

[10]  Ana M. Sánchez,et al.  Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications , 2017, Sensors.

[11]  Daniel J. Blumenthal,et al.  Silicon Nitride in Silicon Photonics , 2018, Proceedings of the IEEE.

[12]  Wei Zhao,et al.  Compact optical phased array using a serial grating antenna design , 2019, 1903.04573.

[13]  Ming C. Wu,et al.  High-accuracy range-sensing system based on FMCW using low-cost VCSEL. , 2018, Optics express.

[14]  Hong Liang,et al.  Multi-Micron Silicon Photonics Platform for Highly Manufacturable and Versatile Photonic Integrated Circuits , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[15]  L. Coldren,et al.  Large-scale InP photonic integrated circuit packaged with ball grid array for 2D optical beam steering , 2013, 2013 IEEE Photonics Conference.

[16]  G. Agrawal,et al.  Nonlinear optical phenomena in silicon waveguides: modeling and applications. , 2007, Optics express.

[17]  Lee Streeter,et al.  Application of lidar techniques to time-of-flight range imaging. , 2015, Applied optics.

[18]  Jens H. Schmid,et al.  Roadmap on silicon photonics , 2016 .

[19]  Javier Ayala,et al.  300-mm Monolithic Silicon Photonics Foundry Technology , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[20]  O. Parriaux,et al.  Coupling gratings as waveguide functional elements , 1996 .

[21]  Ali Hajimiri,et al.  Electronic two-dimensional beam steering for integrated optical phased arrays , 2014, OFC 2014.

[22]  Julio C Gutiérrez-Vega,et al.  Ince-Gaussian beams. , 2004, Optics letters.

[23]  Hiroshi Fukuda,et al.  High-performance silicon photonics technology for telecommunications applications , 2014, Science and technology of advanced materials.

[24]  Hossein Hashemi,et al.  A Monolithically Integrated Large-Scale Optical Phased Array in Silicon-on-Insulator CMOS , 2018, IEEE Journal of Solid-State Circuits.

[25]  Dries Van Thourhout,et al.  Nonlinear silicon nitride waveguides based on a PECVD deposition platform. , 2018, Optics express.

[26]  M. Watts,et al.  Integrated phased array for wide-angle beam steering. , 2014, Optics letters.

[27]  L. Coldren,et al.  Fully integrated hybrid silicon two dimensional beam scanner. , 2015, Optics express.

[28]  Alan Naughton,et al.  Photonic Integrated Circuit-Based FMCW Coherent LiDAR , 2018, Journal of Lightwave Technology.

[29]  Jie Sun,et al.  Large-Scale Silicon Photonic Circuits for Optical Phased Arrays , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[30]  E. Fisher.  Principles and Early Historical Development of Silicon Avalanche and Geiger-Mode Photodiodes , 2017 .

[31]  V. Zwiller,et al.  Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits , 2016, IEEE Photonics Journal.

[32]  Bertrand Szelag,et al.  SiN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength. , 2019, Optics express.

[33]  Michal Lipson,et al.  CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects , 2010 .

[34]  Guo-Qiang Lo,et al.  Monolithic Polarization and Phase Diversity Coherent Receiver in Silicon , 2010, Journal of Lightwave Technology.

[35]  Alexander Fang,et al.  An all-silicon Raman laser , 2005, Nature.

[36]  Marco Casale,et al.  A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications , 2019 .

[37]  G. Masini,et al.  A multi-wavelength 3D-compatible silicon photonics platform on 300mm SOI wafers for 25Gb/s applications , 2013, 2013 IEEE International Electron Devices Meeting.

[38]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[39]  P. Bos,et al.  Beam steering using a liquid crystal optical phase plate with a variable in-plane gradient , 2008 .

[40]  Kazuhiro Ikeda,et al.  Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides. , 2008, Optics express.

[41]  Ray T. Chen,et al.  1 × 12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane , 2011 .

[42]  R. Baets,et al.  Two-dimensional optical phased array antenna on silicon-on-insulator. , 2010, Optics express.

[43]  Stanley Lam,et al.  Laser Eyes for Driverless Cars: The Road to Automotive LIDAR , 2019, 2019 Optical Fiber Communications Conference and Exhibition (OFC).

[44]  Xavier Rottenberg,et al.  Benchmarking time-of-flight based depth measurement techniques , 2016, SPIE OPTO.

[45]  R. Smith.  Optical power handling capacity of low loss optical fibers as determined by stimulated Raman and brillouin scattering. , 1972, Applied optics.

[46]  Guo-Qiang Lo,et al.  Path to silicon photonics commercialization: 25 Gb/s platform development in a CMOS manufacturing foundry line , 2014, OFC 2014.

[47]  H. Driel,et al.  Two-photon absorption and Kerr coefficients of silicon for 850–2200nm , 2007 .

[48]  R. Baets,et al.  Expanding the Silicon Photonics Portfolio With Silicon Nitride Photonic Integrated Circuits , 2017, Journal of Lightwave Technology.

[49]  Ranjeet Kumar,et al.  High-resolution aliasing-free optical beam steering , 2016 .

[50]  Randolph Kirchain,et al.  A roadmap for nanophotonics , 2007 .

[51]  M. Heck.  Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering , 2017 .

[52]  Edoardo Charbon,et al.  Monolithic Single-Photon Avalanche Diodes: SPADs , 2011 .

[53]  Larry A. Coldren,et al.  Fully integrated hybrid silicon free-space beam steering source with 32-channel phased array , 2014, Photonics West - Optoelectronic Materials and Devices.

[54]  Edward A. Watson,et al.  Optical phased array technology , 1996, Proc. IEEE.

[55]  F. Vasey,et al.  Spatial optical beam steerin with an AlGaAs integrated phased array. , 1993, Applied optics.

[56]  Silicon optical-phased-array prototypes using electro-optical phase shifters , 2017, 2017 Conference on Lasers and Electro-Optics (CLEO).

[57]  Michal Lipson,et al.  On-chip platform for a phased array with minimal beam divergence and wide field-of-view. , 2018, Optics express.

[58]  The Thermo Optic Coefficient of Amorphous SiN Films in the Near-Infrared and Visible Regions and Its Experimental Determination , 2013 .

[59]  Michael R. Watts,et al.  Optical Phased Array with Small Spot Size, High Steering Range and Grouped Cascaded Phase Shifters , 2016 .

[60]  L. A. Coldren,et al.  Free-space beam steering in two dimensions using a silicon optical phased array , 2012, OFC/NFOEC.

[61]  Michal Lipson,et al.  Silicon Optical Phased Array with Grating Lobe-Free Beam Formation Over 180 Degree Field of View , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[62]  V. Stojanović,et al.  Overcoming the Coherence Distance Barrier in Long-Range FMCW LIDAR , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[63]  R. Baets,et al.  Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator. , 2009, Optics letters.

[64]  B. Szelag,et al.  Multiple wavelength silicon photonic 200 mm R+D platform for 25Gb/s and above applications , 2016, Photonics Europe.

[65]  Po Dong,et al.  Silicon photonic integrated circuits for telecom and datacom applications , 2018, 2018 23rd Opto-Electronics and Communications Conference (OECC).

[66]  Tin Komljenovic,et al.  Sparse aperiodic arrays for optical beam forming and LIDAR. , 2017, Optics express.

[67]  Alexander Fang,et al.  Integrated Silicon Photonic Laser Sources for Telecom and Datacom , 2013, 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC).

[68]  L. Coldren,et al.  Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator. , 2011, Optics express.

[69]  C. Doerr,et al.  Silicon photonic integration in telecommunications , 2015, Front. Phys..

[70]  R. Tang,et al.  Narrow Spectral Linewidth Silicon Photonic Wavelength Tunable Laser Diode for Digital Coherent Communication System , 2016, IEEE Journal of Selected Topics in Quantum Electronics.

[71]  M. Watts,et al.  On chip wide angle beam steering , 2014, 2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications.

[72]  Jeroen De Coster,et al.  Silicon photonics integrated circuits: a manufacturing platform for high density, low power optical I/O's. , 2015, Optics express.

[73]  David B. Cole,et al.  Coherent solid-state LIDAR with silicon photonic optical phased arrays. , 2017, Optics letters.

[74]  Tao Chu,et al.  Compact, lower-power-consumption wavelength tunable laser fabricated with silicon photonic-wire waveguide micro-ring resonators. , 2009, Optics express.

[75]  Joseph M. Schmitt,et al.  Optical coherence tomography (OCT): a review , 1999 .

[76]  Roel Baets,et al.  Open-Access Silicon Photonics: Current Status and Emerging Initiatives , 2018, Proceedings of the IEEE.

[77]  Ray T. Chen,et al.  On-chip silicon optical phased array for two-dimensional beam steering. , 2014, Optics letters.

[78]  Yu Zhang,et al.  Sub-Wavelength-Pitch Silicon-Phatonic Optical Phased Array for Large Field-AF-Regard Coherent Optical Beam Steering , 2018, 2018 European Conference on Optical Communication (ECOC).

[79]  Matthew J. Byrd,et al.  Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths. , 2017, Optics letters.

[80]  R. Nawrodt,et al.  Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures , 2012 .