Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force

A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The tracking experiments of the tip displacement and gripping force were conducted with a PID controller. It is shown that the standard deviation of tracking error of the tip displacement is less than 0.2 μm and the gripping force is 0.35 mN under a closed-loop control. It would provide some references for realizing high-precision microassembly tasks with the designed microgripper which can control the displacement and gripping force accurately.

[1]  Yu Sun,et al.  Autonomous Robotic Pick-and-Place of Microobjects , 2010, IEEE Transactions on Robotics.

[2]  Kaushik Jayaram,et al.  Development of a flexure-based, force-sensing microgripper for micro-object manipulation , 2010 .

[3]  D. Gracias,et al.  Microchemomechanical Systems , 2011 .

[4]  Robert Lewis Reuben,et al.  A scalable syringe-actuated microgripper for biological manipulation , 2012 .

[5]  Zhaojun Yang,et al.  A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator. , 2012, The Review of scientific instruments.

[6]  褚金奎 Chu Jin-kui,et al.  SU-8 chevron electrothermal micro-actuator with three-layer structures , 2012 .

[7]  Harry E. Stephanou,et al.  A Multiscale Assembly and Packaging System for Manufacturing of Complex Micro-Nano Devices , 2012, IEEE Transactions on Automation Science and Engineering.

[8]  Qingsong Xu,et al.  Design and Robust Repetitive Control of a New Parallel-Kinematic XY Piezostage for Micro/Nanomanipulation , 2012, IEEE/ASME Transactions on Mechatronics.

[9]  Mehdi Boukallel,et al.  Optimal observability-based modelling, design and characterization of piezoelectric microactuators , 2013 .

[10]  Y. Yang,et al.  A hydrogel-based intravascular microgripper manipulated using magnetic fields , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[11]  Q. Yang,et al.  A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing , 2013, IEEE/ASME Transactions on Mechatronics.

[12]  Y. Haddab,et al.  Modeling and Optimal Force Control of a Nonlinear Electrostatic Microgripper , 2013, IEEE/ASME Transactions on Mechatronics.

[13]  Farshad Barazandeh,et al.  Design and microfabrication of a compliant microgripper using nonbrittle and biocompatible material , 2013 .

[14]  Yangmin Li,et al.  Visual Servo Feedback Control of a Novel Large Working Range Micro Manipulation System for Microassembly , 2014, Journal of Microelectromechanical Systems.

[15]  Hui Xie,et al.  A vacuum microgripping tool with integrated vibration releasing capability. , 2014, The Review of scientific instruments.

[16]  Yang Yilin.  A Bridge-type Piezoelectric Microgripper with Integrated Position/Force Sensors , 2015 .

[17]  Yanling Tian,et al.  Design of a Piezoelectric-Actuated Microgripper With a Three-Stage Flexure-Based Amplification , 2015, IEEE/ASME Transactions on Mechatronics.

[18]  Yanling Tian,et al.  A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging. , 2015, The Review of scientific instruments.

[19]  胡俊峰 Hu Jun-feng,et al.  Multi-objective optimization of micro-manipulation stage based on response surface method , 2015 .

[20]  Yanling Tian,et al.  Design and Control of a Compliant Microgripper With a Large Amplification Ratio for High-Speed Micro Manipulation , 2016, IEEE/ASME Transactions on Mechatronics.