Technique for the Rapid Characterization of Parametric Distributions

We present a technique for fast characterization of the statistical mean and sigma of parametric variations. The technique uses a scan chain to sequentially cycle through a device array, creating a periodic waveform that can be directly measured using a multimeter. The dc and root-mean square values of the waveform directly give the mean and sigma of the parameter distribution. We show the technique is sufficiently general and can be applied to a wide range of characterization strategies. A VTH characterization array was implemented in a 65-nm bulk CMOS process where we compare traditional individual device measurements for calculating statistics with the direct mean and sigma measurement technique using the multimeter.

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