Novel piezoelectric-driven XYθ wafer table for an electron beam image projector
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T. Tojo | Ichiro Mori | Toshiaki Shinozaki | Kazuyoshi Sugihara | I. Mori | T. Tojo | Mitsuo Tabata | K. Sugihara | C. Ito | Masamichi Goto | M. Tabata | T. Shinozaki | C. Ito | Masamichi Goto