论文信息 - Silicate formation and thermal stability of ternary rare earth oxides as high-k dielectrics - 字舞流文

Silicate formation and thermal stability of ternary rare earth oxides as high-k dielectrics

O. Richard | C. Adelmann | A. Franquet | J. Swerts | T. Conard | A. Delabie | L. Nyns | S. Gendt | S. Elshocht | P. Lehnen