Piezoelectric ultrasonic micro/milli-scale actuators

Abstract A growing demand for actuators with a volume of less than 1 mm3 has driven researchers to produce a varied range of micro/milli-scale designs. By examining the underlying physics of the actuator operation we are able to demonstrate why piezoelectric ultrasonic actuators have the greatest potential to meet this need. Moreover, it allows us to create a new classification system for piezoelectric ultrasonic actuators, affording us a better understanding of the core characteristics of each class of actuator, which class is most suited to various applications, and highlights potential areas of future research.

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