论文信息 - Evaluation of a Praseodymium Precursor for Atomic Layer Deposition of Oxide Dielectric Films - 字舞流文

Evaluation of a Praseodymium Precursor for Atomic Layer Deposition of Oxide Dielectric Films

D. Gilmer | K. Kukli | M. Ritala | M. Leskelä | T. Sajavaara | T. Pilvi | P. Tobin | H. C. Aspinall | A. C. Jones