Testing aspheric surfaces with computer-generated holograms: analysis of adjustment and shape errors.

Various interferometric methods can be used for testing aspheric surfaces with high accuracy. Using a partially compensating lens in a Twyman-Green arrangement together with a computer-generated hologram instead of a null corrector gives great flexibility. For quantitative analysis a high-resolution automatic fringe analysis is necessary. The interferometric arrangement and the setup for the interferogram data acquisition are described along with different algorithms for calculating the wave front data. Tilt and decentering of the aspheric surface and the synthetic hologram as well as the actual aspherical parameters can be derived from the calculated wave front using Zernike polynomials to communicate with a ray tracing program. For small adjustment and shape errors the linearity will hold, leading to fast correction and numerical compensation of their effects on the surface error. The method is verified by several examples. Experimental results agree with the proposed model.

[1]  R. S. Sirohi,et al.  Optical Testing Using Synthetic Holograms , 1976 .

[2]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[3]  D T Moore,et al.  Large aperture ac interferometer for optical testing. , 1978, Applied optics.

[4]  J C Wyant,et al.  Computer generated hologram; null lens test of aspheric wavefronts. , 1974, Applied optics.

[5]  A A Sawchuk,et al.  Optical phase measurement in real time. , 1979, Applied optics.

[6]  A. F. Fercher,et al.  Optical testing by means of synthetic holograms and partial lens compensation , 1973 .

[7]  Yoshiki Ichioka.  Computer Generated Hologram , 1974 .

[8]  Y Ichioka,et al.  Direct phase detecting system. , 1972, Applied optics.

[9]  A. Handojo,et al.  Interferometer for optical testing with computergenerated holograms. , 1977, Applied optics.

[10]  J C Wyant,et al.  Using computer generated holograms to test aspheric wavefronts. , 1972, Applied optics.

[11]  L. Mertz,et al.  Real-time fringe-pattern analysis. , 1983, Applied optics.

[12]  A. F. Fercher,et al.  Computer-generated Holograms for Testing Optical Elements: Error Analysis and Error Compensation , 1976 .

[13]  M. Takeda,et al.  Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry , 1982 .

[14]  Walter H. Augustyn.  Versatility Of A Microprocessor-Based Interferometric Data Reduction System , 1979, Optics & Photonics.

[15]  T Yatagai,et al.  Interferometric testing with computer-generated holograms: aberration balancing method and error analysis. , 1978, Applied optics.

[16]  N. A. Massie,et al.  Real-time digital heterodyne interferometry: a system. , 1980, Applied optics.

[17]  D. J. Brangaccio,et al.  Digital wavefront measuring interferometer for testing optical surfaces and lenses. , 1974, Applied optics.

[18]  Masanori Idesawa,et al.  Automatic Fringe Analysis Using Digital Image Processing Techniques , 1982 .

[19]  J C Wyant,et al.  Testing aspherics using two-wavelength holography. , 1971, Applied optics.

[20]  W R Funnell,et al.  Image processing applied to the interactive analysis of interferometric fringes. , 1981, Applied optics.

[21]  E.Bernal G.,et al.  Interactive Video Image Digitizer - Application To Interferogram Analysis , 1977, Optics & Photonics.

[22]  O. E. Toler,et al.  Interferogram Evaluation Program For The HP-9825A Calculator , 1979, Photonics West - Lasers and Applications in Science and Engineering.

[23]  Paul F. Forman.  The Zygo Interferometer System , 1979, Optics & Photonics.

[24]  Serge Lowenthal,et al.  Comparison of in-line and carrier frequency holograms in aspheric testing , 1980 .

[25]  Hans J. Tiziani.  Prospects Of Testing Aspheric Surfaces With Computer-Generated Holograms , 1981, Other Conferences.

[26]  J. Schwider,et al.  Testing Aspherics in Reflected Light Using Blazed Synthetic Holograms , 1980 .