Analyze and Simulation for Ultra-precision Lapping Process of New Floatation Cushion

The lapping process of the floatation cushion has a significant influence on the lapping quality,therefore it is of great significant to study the path and velocity of lapping process for guaranteeing the lapping quality.In this paper,based on the kinematics and geometry principle,a path equation was established and the computer simulation software was developed for figuring the path curves of the process,and discuss lapping process of the floatation cushion,systematically analyze the effect of the main process parameters for surface uniformity of the floatation cushion.