Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultralow- pressure measurement. The pressure sensor was designed with a working range of 0–500 Pa and had a high sensitivity of 0.06 mV·V–1·Pa–1. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.

[1]  Anita Fink,et al.  High temperature smart-cut SOI pressure sensor , 2009 .

[2]  Min-Hang Bao,et al.  Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes , 2000 .

[3]  Zhuangde Jiang,et al.  The design and analysis of beam-membrane structure sensors for micro-pressure measurement. , 2012, The Review of scientific instruments.

[4]  Xian Huang,et al.  A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges , 2014 .

[5]  Peter Kinnell,et al.  A hollow stiffening structure for low-pressure sensors , 2010 .

[6]  Zhuangde Jiang,et al.  Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor. , 2013, The Review of scientific instruments.

[7]  Wang Yan,et al.  Micromachined beam-diaphragm structure improves performances of pressure transducer , 1990 .

[8]  J. Greenwood,et al.  A high accuracy resonant pressure sensor by fusion bonding and trench etching , 1999 .

[9]  Madhurima Chattopadhyay,et al.  A new scheme for reducing breathing trouble through MEMS based capacitive pressure sensor , 2016 .

[10]  Akio Yasukawa,et al.  Simulation of circular silicon pressure sensors with a center boss for very low pressure measurement , 1989 .

[11]  Yajun Jiang,et al.  Fiber loop ring-down optical fiber grating gas pressure sensor , 2010 .

[12]  Yan Liu,et al.  Realization of a micro pressure sensor with high sensitivity and overload by introducing beams and Islands , 2015 .

[13]  Mehran Mehregany,et al.  A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement , 2008 .

[14]  Akio Yasukawa,et al.  A special silicon diaphragm pressure sensor with high output and high accuracy , 1981 .

[15]  Zhuangde Jiang,et al.  An Improved Method for the Mechanical Behavior Analysis of Electrostatically Actuated Microplates Under Uniform Hydrostatic Pressure , 2015, Journal of Microelectromechanical Systems.

[16]  Bo Li,et al.  A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging , 2015 .

[17]  M.S. Pridham,et al.  Force‐sensitive tactile sensor for minimal access surgery , 2004, Minimally invasive therapy & allied technologies : MITAT : official journal of the Society for Minimally Invasive Therapy.

[18]  Kazuji Yamada,et al.  Differential Pressure/Pressure Transmitters Applied with Semiconductor Sensors , 1986, IEEE Transactions on Industrial Electronics.

[19]  Beth L. Pruitt,et al.  Review: Semiconductor Piezoresistance for Microsystems , 2009, Proceedings of the IEEE.

[20]  Zhuangde Jiang,et al.  A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure , 2016 .

[21]  H. Sandmaier,et al.  A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges , 1993 .

[22]  Xu Yu,et al.  Modeling and analysis of a novel combined peninsula–island structure diaphragm for ultra-low pressure sensing with high sensitivity , 2016 .

[23]  Josep Samitier,et al.  High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes , 1996 .

[24]  H. Saha,et al.  Low Pressure Piezoresistive Sensors for Medical Electronics Applications , 2006 .

[25]  E. Lavitska,et al.  Medical pressure sensors on the basis of silicon microcrystals and SOI layers , 1999 .