Optical heterodyne laser encoder with sub-nanometer resolution
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Ching-Liang Dai | Cheng-Chih Hsu | Chyan-Chyi Wu | Hui-Yu Chen | Ju-Yi Lee | C. Dai | Chyan-Chyi Wu | Ju-Yi Lee | Cheng-Chih Hsu | Huimin Chen
[1] Chih-Kung Lee,et al. Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems , 1999 .
[2] J. Lawall,et al. Heterodyne interferometer with subatomic periodic nonlinearity. , 1999, Applied optics.
[3] Lijiang Zeng,et al. Two-color heterodyne optical zooming method for nanometer measurement , 2004 .
[4] Chih-Kung Lee,et al. Design verifications of a linear laser encoder with high head-to-scale tolerance , 1999, Optics & Photonics.
[5] Chyan-Chyi Wu,et al. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution , 2007 .
[6] Jiro Otsuka,et al. Development of a small ultraprecision positioning device with 5 nm resolution , 2005 .
[7] Marek Dobosz. High-resolution laser linear encoder with numerical error compensation , 1999 .