VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

This paper presents a single Double-Ended Tuning Fork (DETF) MEMS resonator-based band-pass filter fabricated on a commercial standard CMOS technology. The accurate design of this resonator demonstrates the ability to perform filtering without the need of coupling multiple resonators. The main characteristic is to define the out-of-phase mode resonance frequency of the DETF smaller than the in-phase mode frequency. The electrical characterization shows that this stand-alone band-pass filter presents a 44.4MHz central frequency with a 0.6% bandwidth in air.

[1]  G. Abadal,et al.  Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range , 2008, IEEE Electron Device Letters.

[2]  Jize Yan,et al.  Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[3]  Jize Yan,et al.  Mechanical phase inversion for coupled lamé mode resonator array filters , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[4]  Liwer Lrti,et al.  Micro Electromechanical Filters for Signal Processing , 1992 .

[5]  G. Abadal,et al.  VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[6]  J.T.M. van Beek,et al.  Narrow Bandwidth Single-Resonator MEMS Tuning Fork Filter , 2007, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.

[7]  R. Howe,et al.  Microelectromechanical filters for signal processing , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[8]  G. Abadal,et al.  Double-ended tuning fork resonator in 0.35um CMOS technology for RF applications , 2008, 2008 Ph.D. Research in Microelectronics and Electronics.