Focused Ion Beam Microscopy and Micromachining

The fairly recent availability of commercial focused ion beam (FIB) microscopes has led to rapid development of their applications for materials science. FIB instruments have both imaging and micromachining capabilities at the nanometer‐micrometer scale; thus, a broad range of fundamental studies and technological applications have been enhanced or made possible with FIB technology. This introductory article covers the basic FIB instrument and the fundamentals of ion‐solid interactions that lead to the many unique FIB capabilities as well as some of the unwanted artifacts associated with FIB instruments. The four topical articles following this introduction give overviews of specific applications of the FIB in materials science, focusing on its particular strengths as a tool for characterization and transmission electron microscopy sample preparation, as well as its potential for ion beam fabrication and prototyping.

[1]  Alfred Wagner,et al.  High Resolution Focused Ion Beams: FIB and Its Applications , 2003 .

[2]  Y. Fu,et al.  Crystallographically-dependent ripple formation on Sn surface irradiated with focused ion beam , 2005 .

[3]  H. Ryssel,et al.  Nanoscale effects in focused ion beam processing , 2003 .

[4]  J. Melngailis,et al.  Focused ion beam induced deposition and ion milling as a function of angle of ion incidence , 1992 .

[5]  G. R. Ringo,et al.  Ion source of high brightness using liquid metal , 1975 .

[6]  J. C. Jaeger,et al.  Conduction of Heat in Solids , 1952 .

[7]  Klaus Edinger,et al.  Focused ion beam sputter yield change as a function of scan speed , 1997 .

[8]  H. Ryssel,et al.  Limitations of focused ion beam nanomachining , 2001 .

[9]  Lucille A. Giannuzzi,et al.  Introduction to Focused Ion Beams , 2005 .

[10]  M. Utlaut,et al.  Fundamental limits to imaging resolution for focused ion beams , 1996 .

[11]  P. Sigmund.  A mechanism of surface micro-roughening by ion bombardment , 1973 .

[12]  Peter H. Bartels,et al.  Field ion microscopy;: Principles and applications, , 1969 .

[13]  Hidemi Koike,et al.  Transmission Electron Microscope Sample Preparation Using a Focused Ion Beam , 1994 .

[14]  P. Sigmund.  Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets , 1969 .

[15]  Jon Orloff,et al.  High‐resolution focused ion beams , 1993 .

[16]  Quantitative electron spectroscopic imaging studies of microelectronic metallization layers , 1999, Journal of microscopy.

[17]  M. Aziz,et al.  Spontaneous formation of patterns on sputtered surfaces , 2003 .

[18]  L. Rosenhead.  Conduction of Heat in Solids , 1947, Nature.

[19]  Self-organized ordering of nanostructures produced by ion-beam sputtering. , 2005, Physical review letters.

[20]  P. D. Prewett,et al.  Focused ion beams from liquid metal ion sources , 1991 .

[21]  T. Ishitani,et al.  Calculation of Local Temperature Rise in Focused-Ion-Beam Sample Preparation , 1995 .

[22]  R. L. Seliger,et al.  A high‐intensity scanning ion probe with submicrometer spot size , 1979 .

[23]  J. Melngailis.  Focused ion beam technology and applications , 1987 .

[24]  Mark E. Law,et al.  Ion beams in silicon processing and characterization , 1997 .

[25]  O. A. Urquidez,et al.  Shocks in Ion Sputtering Sharpen Steep Surface Features , 2005, Science.

[26]  K. Ohya,et al.  Origins of material contrast in scanning ion microscope images. , 2002, Journal of electron microscopy.

[27]  R. B. Irwin,et al.  Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique , 1998 .

[28]  C. A. Volkert,et al.  Size effects in the deformation of sub-micron Au columns , 2006 .

[29]  J. Poate,et al.  Ion Implantation and Beam Processing , 1984 .

[30]  C. Volkert,et al.  Transmission electron microscopy of fluorapatite–gelatine composite particles prepared using focused ion beam milling , 2004, Journal of microscopy.

[31]  L. Swanson.  Liquid metal ion sources: Mechanism and applications , 1983 .

[32]  H. W. Werner,et al.  Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends , 1987 .

[33]  Lucille A. Giannuzzi,et al.  Ion channeling effects on the focused ion beam milling of Cu , 2001 .

[34]  M. Nastasi,et al.  Ion-Solid Interactions: Fundamentals and Applications , 1996 .