RESONANT CURVED PIEZOELECTRIC CANTILEVER FLUID DIODE WINGS FOR MASS-PRODUCIBLE FLYING MICROROBOTS

.............................................................................................................................................. III ACKNOWLEDGEMENTS: .......................................................................................................................... IV TABLE OF CONTENTS: .............................................................................................................................. VI LIST OF FIGURES: ................................................................................................................................... XIV LIST OF TABLES: .................................................................................................................................... XXV LIST OF ABBREVIATIONS AND SYMBOLS .............................................................................................. XXVI GLOSSARY OF ABBREVIATIONS, ACRONYMS, AND TERMS ..................................................................................... XXVI LIST OF SYMBOLS: VARIABLE DICTIONARY ........................................................................................................ XXVII Alphabetical Listing (with Greek letters after the letters that type them in Symbol font): ............... xxvii DECLARATION OF ACADEMIC ACHIEVEMENT: ..................................................................................... XXXI CHAPTER

[1]  H. Yoo,et al.  In-plane vibration analysis of cantilevered circular arc beams undergoing rotational motion , 2008 .

[2]  Christofer Hierold,et al.  Fabrication and characterization of folded SU-8 suspensions for MEMS applications , 2006 .

[3]  E. Lemmon,et al.  Viscosity and Thermal Conductivity Equations for Nitrogen, Oxygen, Argon, and Air , 2004 .

[4]  J. Soderkvist,et al.  Anisotropic etching of Z-cut quartz , 1993 .

[5]  V. E. Bottom.  Measurement of the Piezoelectric Coefficient of Quartz Using the Fabry‐Perot Dilatometer , 1970 .

[6]  David T. Chang,et al.  Optimized DRIE etching of ultra-small quartz resonators , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.

[7]  Srinivas Tadigadapa,et al.  High speed anisotropic etching of Pyrex® for microsystems applications , 2006 .

[8]  D. S. Steinberg,et al.  Vibration Analysis for Electronic Equipment, 2nd Edition , 1988 .

[9]  K. Hjort,et al.  X-cut miniature tuning forks realized by ion track lithography , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[10]  P. Bidaud,et al.  Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film , 2003 .

[11]  Silvan Schmid,et al.  Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams , 2008 .

[12]  K. Sato,et al.  Development of quartz etching database and 3-D micromachining simulation system , 2003, MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717).

[14]  M. A. Sleigh.  Mechanisms of flagellar propulsion , 1991 .

[15]  Maurice Petyt,et al.  Vibration of curved plates , 1971 .

[16]  Robert J. Wood,et al.  Progress on "Pico" Air Vehicles , 2011, ISRR.

[17]  M. Laudon,et al.  Mechanical characterization of a new high-aspect-ratio near UV-photoresist , 1998 .

[18]  Gen Yamada,et al.  Natural frequencies of in-plane vibration of arcs , 1983 .

[19]  J. K. Vondeling.  Fluoride-based etchants for quartz , 1983 .

[20]  D. Choi,et al.  Formation of plasma induced surface damage in silica glass etching for optical waveguides , 2004 .

[21]  Mao Sun,et al.  A computational study of the aerodynamic forces and power requirements of dragonfly (Aeschna juncea) hovering , 2004, Journal of Experimental Biology.

[22]  Ryutaro Maeda,et al.  High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection , 2009 .

[23]  Henning Fouckhardt,et al.  Self-masking controlled by metallic seed layer during glass dry-etching for optically scattering surfaces , 2010 .

[24]  H. Chen,et al.  An investigation into the characteristics of deep reactive ion etching of quartz using SU-8 as a mask , 2008 .

[25]  Srinivas Tadigadapa,et al.  Micromachined quartz resonator based infrared detector array , 2009 .

[26]  M. Dickinson.  Solving the mystery of insect flight. , 2001, Scientific American.

[27]  R.G. Polcawich,et al.  PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[28]  K. Jonnalagadda,et al.  Mechanical Behavior and Anisotropy of Spin-Coated SU-8 Thin Films for MEMS , 2014, Journal of Microelectromechanical Systems.

[29]  Peter Vettiger,et al.  Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications , 1998 .

[30]  The piezoelectric effect of GaAs used for resonators and resonant sensors , 1994 .

[31]  S. Timoshenko,et al.  Analysis of Bi-Metal Thermostats , 1925 .

[32]  J. Banerjee.  EXPLICIT FREQUENCY EQUATION AND MODE SHAPES OF A CANTILEVER BEAM COUPLED IN BENDING AND TORSION , 1999 .

[33]  A. Pisano,et al.  Modeling and optimal design of piezoelectric cantilever microactuators , 1997 .

[34]  Gabriel A. Devenyi,et al.  Optimum reactive ion etching of x-cut quartz using SF6 and Ar , 2013 .

[35]  M. Esashi,et al.  Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases , 2003 .

[36]  Wen J. Li,et al.  A Biomimetic Flying Silicon Microchip: Feasibility Study , 2004, 2004 IEEE International Conference on Robotics and Biomimetics.

[37]  Isao Shimoyama,et al.  Study on wings of flying microrobots , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.

[38]  R. Wootton.  FUNCTIONAL MORPHOLOGY OF INSECT WINGS , 1992 .

[39]  Caroline Soyer,et al.  Micromachining of an SU-8 flapping-wing flying micro-electro-mechanical system , 2009 .

[40]  K. Mateti,et al.  Monolithic SUEX Flapping Wing Mechanisms for Pico Air Vehicle Applications , 2013, Journal of Microelectromechanical Systems.

[41]  Robert J. Wood,et al.  The First Takeoff of a Biologically Inspired At-Scale Robotic Insect , 2008, IEEE Transactions on Robotics.

[42]  F. Lehmann,et al.  The control of wing kinematics and flight forces in fruit flies (Drosophila spp.). , 1998, The Journal of experimental biology.

[43]  Bo Li,et al.  Low-stress ultra-thick SU-8 UV photolithography process for MEMS , 2005 .

[44]  M. Esashi,et al.  Deep reactive ion etching of Pyrex glass using SF6 plasma , 2001 .

[45]  J. Fluitman,et al.  A survey on the reactive ion etching of silicon in microtechnology , 1996 .