Multi-Fields Simulation Model for Micro-Machined Capacitive Accelerometer

To cope with the multi-physics fields simulation in MEMS device, based on PSPICE software, a multi-fields simulation model of capacitive micro-accelerometer is proposed, in which the mechanics, thermal and electric fields are included. Through the comparison of maximum step and pulse acceleration response under large displacement condition, which are obtained by simulation model and classic formula respectively, it is indicated that the difference between them is less than 3%. Furthermore, the comparison has been done with sensitivity test results in open loop mode. The comparison results show that the difference is less than 5% for large displacement situation and 3% for little displacement situation. Hence, the model could basically accomplish multi-physics fields simulation in MEMS device and be helpful in further research.

[1]  Yuelin Wang,et al.  Reliable operation conditions of capacitive inertial sensor for step and shock signals , 2004 .

[2]  Lufeng Che,et al.  Effects of bias voltage polarity on differential capacitive sensitive devices , 2004 .

[3]  T.L. Grigorie.  The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 2: Closed loop , 2008, 2008 International Conference on Perspective Technologies and Methods in MEMS Design.

[4]  Wang Yong.  RESEARCH ON A MICRO-ACCELEROMETER’S SYSTEMIC MODELING BASED ON EQUIVALENT CIRCUIT METHOD , 2006 .

[5]  Liming Wu,et al.  Research on gas film damping of an electrostatically levitated micromachined accelerometer , 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[6]  François Pêcheux,et al.  VHDL-AMS and Verilog-AMS as alternative hardware description languages for efficient modeling of multidiscipline systems , 2005, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

[7]  B.Y. Majlis,et al.  Simulation of an analog differential capacitive accelerometer , 2004, 2004 IEEE International Conference on Semiconductor Electronics.

[8]  Liu Yunfeng.  Gas damping of an electrostatically levitated micro-silicon gyroscope , 2007 .

[9]  T.L. Grigorie,et al.  The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 1: Open loop , 2008, 2008 International Conference on Perspective Technologies and Methods in MEMS Design.