论文信息 - Critical Components of FinFet Integration: Examining the Density Trade-off and Process Integration for FinFET Implementation - 字舞流文

Critical Components of FinFet Integration: Examining the Density Trade-off and Process Integration for FinFET Implementation

Byoung Hun Lee | Ji-Woon Yang | Raj Jammy | Joel Barnett | Muhammad M. Hussain | Casey Smith | R. Harris | B. Sassman | Seung-Chul Song | H.-H. Tseng