论文信息 - A MEMS microphone for aeroacoustics measurements

A MEMS microphone for aeroacoustics measurements

This paper presents the development of a siliconmicromachined, piezoresistive~ microphone for aeroacaustics measurements. The microphone consists of four dielectrically-isolated, single-crystal silicon piezoresistors on top of a 1500 A-thick, 210 pm-diameter silicon-nitride membrane. The microphone was designed by employing a fundamental structural model coupled with a lumped-element energy model. Preliminary measurements indicate a sensitivity of &V/V/Pa and a linear response up to 155 dB. The measured and predicted sensitivity agree to within 3 dB.

K. Breuer | M. Schmidt | J. Seiner | M. Sheplak

[1] R. Howe,et al. Design and calibration of a microfabricated floating-element shear-stress sensor , 1988 .

[2] P. W. Barth,et al. A theoretical study of transducer noise in piezoresistive and capacitive silicon pressure sensors , 1988 .

[3] R. Schellin,et al. A silicon subminiature microphone based on piezoresistive polysilicon strain gauges , 1992 .

[4] Martin A. Schmidt,et al. A microfabricated floating-element shear stress sensor using wafer-bonding technology , 1992 .

[5] Wouter Olthuis,et al. A review of silicon microphones , 1994 .

[6] G. Stemme,et al. Small silicon based pressure transducers for measurements in turbulent boundary layers , 1994 .

[7] Lennart Löfdahl,et al. A small-size silicon microphone for measurements in turbulent gas flows , 1994 .

[8] Kenneth S. Breuer,et al. A Silicon Micromachined Floating-element Shear-stress Sensor With Optical Position Sensing By Photodiodes , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[9] R. Schellin,et al. Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms , 1995 .

[10] Kenneth S. Breuer,et al. A silicon micromachined sensor for shear stress measurements in aerodynamic flows , 1996 .