Object Positioning Using A Surface Micromachined Distributed System

A device is presented for the positioning of small objects. It consists of an array of small, surface micromachined actuators. These electrostatically actuated devices lift and lower the object to be positioned, shifting it sideways. The typical 'step size' is around 200 nm, making accurate positioning possible. Objects with weights of up to 3 kg/m2 can be positioned using drive voltages between 10 to 50 V, depending on the device design. The compatibility with integrated electronic circuits make flexible and multi functional systems possible.