Micro inductors using low temperature fabrication processes for integrated DC-DC microconverters

We present in this paper trends and technologies for the integration of inductors for DC-DC microconverters. In particular, we present the fabrication steps of different structures as a function of the application: planar inductors for low power consumption, and 3D magnetic inductors for higher power. These devices are achieved using low temperature fabrication processes based in photolithography or and electroplating techniques.

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