Electron transport in ZnO thin films

Epitaxial n-type ZnO films grown by a laser molecular-beam epitaxy method were investigated by the temperature-dependent Hall-effect technique. The 300K carrier concentration and mobility were about ns∼1016cm−3 and 440cm2∕Vs, respectively. Transport characteristics are calculated by solving the Boltzmann transport equation using a variational method. Mobility limit of 430cm2∕Vs was calculated at 300K. The temperature dependence of the mobility for an undoped film is calculated and agrees favorably well with experimental data if physical parameters are chosen so as to approach those. In the experimental “mobility versus concentration” curve, unusual phenomenon was observed, i.e., mobilities at ns∼5×1018cm−3 are significantly smaller than those at higher densities above ∼1020cm−3. It is qualitatively explained in terms of electron-plasmon interaction.

[1]  K. Seeger,et al.  Semiconductor Physics: An Introduction , 1973 .

[2]  H. Koinuma,et al.  Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer , 2003 .

[3]  Akira Ohtomo,et al.  Pulsed laser deposition of thin films and superlattices based on ZnO , 2005 .

[4]  Fischetti,et al.  Effect of the electron-plasmon interaction on the electron mobility in silicon. , 1991, Physical review. B, Condensed matter.

[5]  Jeremiah R. Lowney,et al.  Majority and minority electron and hole mobilities in heavily doped GaAs , 1991 .

[6]  David S. Ginley,et al.  Transparent Conducting Oxides , 2000 .

[7]  K. Ellmer Resistivity of polycrystalline zinc oxide films: current status and physical limit , 2001 .

[8]  T. Yao,et al.  Effects of ZnO/MgO Double Buffer Layers on Structural Quality and Electron Mobility of ZnO Epitaxial Films Grown on c-Plane Sapphire , 2002 .

[9]  D. Look,et al.  Residual Native Shallow Donor in ZnO , 1999 .

[10]  David C. Look,et al.  Degenerate layer at GaN/sapphire interface: Influence on Hall-effect measurements , 1997 .

[11]  D. C. Reynolds,et al.  Electrical properties of bulk ZnO , 1998 .

[12]  K. Brennan,et al.  High field electron transport properties of bulk ZnO , 1999 .

[13]  D. L. Rode,et al.  Chapter 1 Low-Field Electron Transport , 1975 .

[14]  T. Makino,et al.  Optical properties of excitons in ZnO-based quantum well heterostructures , 2004 .

[15]  T. Yao,et al.  Effect of O/Zn Flux Ratio on Crystalline Quality of ZnO Films Grown by Plasma-Assisted Molecular Beam Epitaxy , 2003 .

[16]  H. Ohno,et al.  Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO , 2004 .

[17]  H. Ruda,et al.  Electron transport in ZnS , 1990 .

[18]  H. Koinuma,et al.  Optical properties of ZnO:Al epilayers: Observation of room-temperature many-body absorption-edge singularity , 2002 .

[19]  Marius Grundmann,et al.  High electron mobility of epitaxial ZnO thin films on c-plane sapphire grown by multistep pulsed-laser deposition , 2003 .

[20]  A. Ohtomo,et al.  Gallium concentration dependence of room-temperature near-band-edge luminescence in n-type ZnO:Ga , 2004, cond-mat/0406211.