Tuning the Ignition Performance of a Microchip Initiator by Integrating Various Al/MoO3 Reactive Multilayer Films on a Semiconductor Bridge.

Reactive multilayer films (RMFs) can be integrated into semiconducting electronic structures with the use of microelectromechanical systems (MEMS) technology and represent potential applications in the advancement of microscale energy-demanding systems. In this study, aluminum/molybdenum trioxide (Al/MoO3)-based RMFs with different modulation periods were integrated on a semiconductor bridge (SCB) using a combination of an image reversal lift-off process and magnetron sputtering technology. This produced an energetic semiconductor bridge (ESCB)-chip initiator with controlled ignition performance. The effects of the Al/MoO3 RMFs with different modulation periods on ignition properties of the ESCB initiator were then systematically investigated in terms of flame duration, maximum flame area, and the reaction ratio of the RMFs. These microchip initiators achieved flame durations of 60-600 μs, maximum flame areas of 2.85-17.61 mm2, and reaction ratios of ∼14-100% (discharged with 47 μF/30 V) by simply changing the modulation periods of the Al/MoO3 RMFs. This behavior was also consistent with a one-dimensional diffusion reaction model. The microchip initiator exhibited a high level of integration and proved to have tuned ignition performance, which can potentially be used in civilian and military applications.

[1]  Rui Li,et al.  Pressure loss and compensation in the combustion process of Al-CuO nanoenergetics on a microheater chip , 2014 .

[2]  Kaili Zhang,et al.  A Nano Initiator Realized by Integrating Al/CuO-Based Nanoenergetic Materials With a Au/Pt/Cr Microheater , 2008, Journal of Microelectromechanical Systems.

[3]  J. Maria,et al.  Probing the Reaction Dynamics of Thermite Nanolaminates , 2015 .

[4]  R. Shen,et al.  Energetic semiconductor bridge device incorporating Al/MoOx multilayer nanofilms and negative temperature coefficient thermistor chip , 2014 .

[5]  Kaili Zhang,et al.  Integration of nano-Al with Co3O4 nanorods to realize high-exothermic core–shell nanoenergetic materials on a silicon substrate , 2012 .

[6]  Y. Chabal,et al.  Enhancing the Reactivity of Al/CuO Nanolaminates by Cu Incorporation at the Interfaces. , 2015, ACS applied materials & interfaces.

[7]  Ludovic Salvagnac,et al.  Magnetron Sputtered Al-CuO Nanolaminates: Effect of Stoichiometry and Layers Thickness on Energy Release and Burning Rate , 2014 .

[8]  Y. Chabal,et al.  Multilayered Al/CuO thermite formation by reactive magnetron sputtering: Nano versus micro , 2010 .

[9]  W. Shi,et al.  Characteristics of the Energetic Igniters Through Integrating Al/NiO Nanolaminates on Cr Film Bridge , 2015, Nanoscale Research Letters.

[10]  P. Zhu,et al.  Influence of Al/CuO reactive multilayer films additives on exploding foil initiator , 2011 .

[11]  Xueming Li,et al.  Highly reactive Al–Cr2O3 coating for electric-explosion applications , 2016 .

[12]  R. W. Bickes,et al.  Semiconductor bridge (SCB) igniter studies: 1, Comparison of SCB and hot-wire pyrotechnic actuators , 1988 .

[13]  D. Adams.  Reactive Multilayers Fabricated by Vapor Deposition: A Critical Review , 2015 .

[14]  W. Shi,et al.  Fabrication and characterization of Al/NiO energetic nanomultilayers , 2015 .

[15]  Kee-Soo Nam,et al.  Plasma electron density generated by a semiconductor bridge as a function of input energy and land material , 1997 .

[16]  Xueming Li,et al.  Electrophoretic assembly of B–Ti nanoenergetic coating for micro-ignitor application , 2016 .

[17]  S. Basu,et al.  Modeling of a reacting nanofilm on a composite substrate , 2011 .

[18]  Ren Hui,et al.  Ignition characteristics of semiconductor bridge based on lead styphnate and lead azide charges under capacitor discharge conditions , 2016 .

[19]  C. L. Tien,et al.  Molecular Dynamics Study of Solid Thin-Film Thermal Conductivity , 1998, Heat Transfer.

[20]  Sung-Ho Choi,et al.  Characteristics of plasma generated by polysilicon semiconductor bridge (SCB) , 2002 .

[21]  Kaili Zhang,et al.  Nanoenergetic Materials for MEMS: A Review , 2007, Journal of Microelectromechanical Systems.

[22]  Xiaoping Zhou,et al.  Nanostructured energetic composites: synthesis, ignition/combustion modeling, and applications. , 2014, ACS applied materials & interfaces.

[23]  Ji Hoon Kim,et al.  A micro-chip initiator with controlled combustion reactivity realized by integrating Al/CuO nanothermite composites on a microhotplate platform , 2015 .

[24]  R. Shen,et al.  Characterization of Al/CuO nanoenergetic multilayer films integrated with semiconductor bridge for initiator applications , 2013 .

[25]  Xavier Dollat,et al.  Integration of a MEMS based safe arm and fire device , 2010 .

[26]  Véronique Conédéra,et al.  Micro-chip initiator realized by integrating Al/CuO multilayer nanothermite on polymeric membrane , 2013 .

[27]  Peng Zhu,et al.  Deposition and characterization of highly energetic Al/MoO x multilayer nano-films , 2013 .

[28]  Carole Rossi,et al.  Design, fabrication and modeling of solid propellant microrocket-application to micropropulsion , 2002 .

[29]  Wayne M. Trott,et al.  Semiconductor bridge: A plasma generator for the ignition of explosives , 1987 .

[30]  T. Yamane,et al.  Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method , 2002 .

[31]  Jongkwang Lee,et al.  MEMS solid propellant thruster array with micro membrane igniter , 2013 .

[32]  F. Brotzen,et al.  Effect of thickness on the transverse thermal conductivity of thin dielectric films , 1994 .