PULSED LINEAR ANTENNA MICROWAVE PLASMA – A STEP AHEAD IN LARGE AREA MATERIAL DEPOSITIONS AND SURFACE FUNCTIONALIZATION

A technological progress in the large area growth of diamond films and carbon nanotubes by pulsed linear antenna microwave plasma system is presented. We show a correlation between process parameters and nanoor poly-crystalline film character. Diamond coated mirrors and ATR-FTIR prisms are shown as multifunctional optical elements suitable for detection of molecules and functionalized nanoparticles. Additional positive feature of the presented plasma system is a low temperature hydrogen functionalization of diamond films. Finally, we present that combination of such plasma with radio frequency modulated substrate bias results in a growth of oriented CNTs over large area.

[1]  B. Rezek,et al.  Linear antenna microwave plasma CVD deposition of diamond films over large areas , 2012 .

[2]  A. Kromka,et al.  Novel plasma treatment in linear antenna microwave PECVD system , 2012 .

[3]  Z. Remeš,et al.  Grazing angle reflectance spectroscopy of organic monolayers on nanocrystalline diamond films , 2011 .

[4]  Z. Remeš,et al.  Optical characterisation of organosilane-modified nanocrystalline diamond films , 2011 .

[5]  M. Ishihara,et al.  Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition , 2010 .

[6]  Alexander Kromka,et al.  Micro-Pattern Guided Adhesion of Osteoblasts on Diamond Surfaces , 2009, Sensors.

[7]  M. Vaněček,et al.  The infrared optical absorption spectra of the functionalized nanocrystalline diamond surface , 2009 .

[8]  M. Vaněček,et al.  Detecting sp2 phase on diamond surfaces by atomic force microscopy phase imaging and its effects on surface conductivity , 2009 .

[9]  B. Rezek,et al.  Adhesion of osteoblasts on chemically patterned nanocrystalline diamonds , 2008 .

[10]  H. Fan,et al.  Hydrogen-free carbon thin films prepared by new type surface-wave-sustained plasma (SWP) , 2007 .

[11]  S. Kogoshi,et al.  Mechanism for Sustainment of High Density in Surface Wave Plasma , 2004 .

[12]  Jian Wang,et al.  Conductive diamond thin-films in electrochemistry , 2003 .

[13]  C. Nebel.  From gemstone to semiconductor , 2003, Nature materials.

[14]  S. Sinnott,et al.  Carbon Nanotubes: Synthesis, Properties, and Applications , 2001 .

[15]  S. Iijima.  Helical microtubules of graphitic carbon , 1991, Nature.